Silicon nitride PIC-based multi-color laser engines for life science applications.

We implement a multi-color laser engine with silicon nitride photonic integrated circuit technology, that combines four fluorophore excitation wavelengths (405 nm, 488 nm, 561 nm, 640 nm) and splits them with variable attenuation among two output fibers used for different microscope imaging modalities. With the help of photonic integrated circuit technology, the volume of the multi-color laser engine's optics is reduced by two orders of magnitude compared to its commercially available discrete optics counterpart. Light multiplexing is implemented by means of a directional coupler based device and variable optical attenuation as well as fiber switching with thermally actuated Mach-Zehnder interferometers. Total insertion losses from lasers to output fibers are in the order of 6 dB at 488 nm, 561 nm, and 640 nm. Higher insertion losses at 405 nm can be further improved on. In addition to the system level results, spectrally resolved performance has been characterized for each of the developed devices.

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source.

A continuous improvement of resolution in mask-aligner lithography is sought after to meet the requirements of an ever decreasing minimum feature size in back-end processes. For periodic structures, utilizing the Talbot effect for lithography has emerged as a viable path. Here, by combining the Talbot effect with a continuous wave laser source emitting at 193 nm, we demonstrate successfully the fabrication of periodic arrays in silicon substrates with sub-micron feature sizes. The excellent coherence and the superior brilliance of this light source, compared to more traditional mercury lamps and excimer lasers as light source, enables the efficient beam shaping and a reduced minimum feature size at a fixed gap of 20 µm. We present a comprehensive study of proximity printing with this system, including simulations and selected experimental results of prints in up to the fourth Talbot plane. This printing technology can be used to manufacture optical metasurfaces, bio-sensor arrays, membranes, or microchannel plates.

Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm.

We present a mask-aligner lithographic system operated with a frequency-quadrupled continuous-wave diode laser emitting at 193 nm. For this purpose, a 772 nm diode laser is amplified by a tapered amplifier in the master-oscillator power-amplifier configuration. The emission wavelength is upconverted twice, using LBO and KBBF nonlinear crystals in second-harmonic generation enhancement cavities. An optical output power of 10 mW is achieved. As uniform exposure field illumination is crucial in mask-aligner lithography, beam shaping is realized with optical elements made from fused silica and CaF2 featuring a diffractive non-imaging homogenizer. A tandem setup of shaped random diffusers, one static and one rotating, is used to control speckle formation. We demonstrate first experimental soft contact and proximity prints for a field size of 1 cm2 with a standard binary photomask and proximity prints with a two-level phase mask, both printed into 120 nm layers of photoresist on unstructured silicon substrates.

All fiber-coupled THz-TDS system with kHz measurement rate based on electronically controlled optical sampling.

We demonstrate a completely fiber-coupled terahertz (THz) time-domain spectrometer (TDS) system based on electronically controlled optical sampling with two erbium-doped femtosecond fiber lasers at a central wavelength of 1560 nm. The system employs optimized InGaAs/InAlAs photoconductive antennas for THz generation and detection. With this system, we achieve measurement rates of up to 8 kHz and up to 180 ps scan range. We further achieve 2 THz spectral bandwidth and a dynamic range of 76 dB at only 500 ms measurement time.

1.3-mW tunable and narrow-band continuous-wave light source at 191 nm.

We report on the realization of a continuous-wave light source based on nonlinear interaction in KBBF at a wavelength of 191 nm. More than 1.3 mW of deep-ultraviolet power was generated in a mechanically robust setup pumped by an amplified grating stabilized diode laser. Mode hop-free tuning over 40 GHz at 191 nm could be demonstrated.

Multi-color flow cytometer with PIC-based structured illumination.

We demonstrate a flow cytometer in which structured light illumination is used to attribute fluorescent and scattering signals to their excitation wavelength. A suitable multi-color light source emitting structured illumination patterns at 405, 488, 561 and 640 nm is developed based on a silicon nitride photonic integrated circuit and cytometry experiments are conducted with calibration beads. Performance metrics of the novel cytometer are compared with those of a mature, commercial device. While the experimental device still features a slightly higher sensitivity floor than the commercial one, all but the most weakly stained beads can be categorized. These promising results validate the feasibility of the proposed concept.

Comb-locked frequency-swept synthesizer for high precision broadband spectroscopy.

Frequency combs have made optical metrology accessible to hundreds of laboratories worldwide and they have set new benchmarks in multi-species trace gas sensing for environmental, industrial and medical applications. However, current comb spectrometers privilege either frequency precision and sensitivity through interposition of a cw probe laser with limited tuning range, or spectral coverage and measurement time using the comb itself as an ultra-broadband probe. We overcome this restriction by introducing a comb-locked frequency-swept optical synthesizer that allows a continuous-wave laser to be swept in seconds over spectral ranges of several terahertz while remaining phase locked to an underlying frequency comb. This offers a unique degree of versatility, as the synthesizer can be either repeatedly scanned over a single absorption line to achieve ultimate precision and sensitivity, or swept in seconds over an entire rovibrational band to capture multiple species. The spectrometer enables us to determine line center frequencies with an absolute uncertainty of 30 kHz and at the same time to collect absorption spectra over more than 3 THz with state-of-the-art sensitivity of a few 10-10 cm-1. Beyond precision broadband spectroscopy, the proposed synthesizer is an extremely promising tool to force a breakthrough in terahertz metrology and coherent laser ranging.