Third Harmonic Generation Enhancement and Wavefront Control Using a Local High-Q Metasurface.

High quality factor optical nanostructures provide a great opportunity to enhance nonlinear optical processes such as third harmonic generation. However, the field enhancement in these high quality factor structures is typically accompanied by optical mode nonlocality. As a result, the enhancement of nonlinear processes comes at the cost of their local control as needed for nonlinear wavefront shaping, imaging, and holography. Here we show simultaneous strong enhancement and spatial control over third harmonic generation with a local high-Q metasurface relying on higher-order Mie resonant modes. Our results demonstrate third harmonic generation at an efficiency of up to 3.25 × 10-5, high quality wavefront shaping as illustrated by a third harmonic metalens, and a flatband, angle independent, third harmonic response up to ±11° incident angle. The demonstrated high level of local control and efficient frequency conversion offer promising prospects for realizing novel nonlinear optical devices.

Multiwavelength Achromatic Deflector in the Visible Using a Single-Layer Freeform Metasurface.

Deflectors are essential for modulating beam direction in optical systems but often face form factor issues or chromatic aberration with conventional optical elements, such as prisms, mirrors, and diffractive/holographic optical elements. Despite recent efforts to address such issues using metasurfaces, their practicality remains limited due to operation wavelengths in the near-infrared or the fabrication difficulties inherent in the multilayer scheme. Here, we propose a novel single-layer metasurface achieving multiwavelength chromatic aberration-free deflection across the visible spectrum by employing the robust freeform design strategy to simplify the fabrication process. By properly selecting diffraction orders for red, green, and blue wavelengths to achieve identical wavelength-diffraction-order products, the metasurface deflects light at a consistent angle of 41.3° with a high efficiency. The coupled Bloch mode analysis explains the physical properties, and experimental fabrication and characterization confirm its effectiveness. This approach holds potential for various applications such as AR/VR, digital cameras, and high-quality optical systems.

High-Performance Refractive Index and Temperature Sensing Based on Toroidal Dipole in All-Dielectric Metasurface.

This article shows an all-dielectric metasurface consisting of "H"-shaped silicon disks with tilted splitting gaps, which can detect the temperature and refractive index (RI). By introducing asymmetry parameters that excite the quasi-BIC, there are three distinct Fano resonances with nearly 100% modulation depth, and the maximal quality factor (Q-factor) is over 104. The predominant roles of different electromagnetic excitations in three distinct modes are demonstrated through near-field analysis and multipole decomposition. A numerical analysis of resonance response based on different refractive indices reveals a RI sensitivity of 262 nm/RIU and figure of merit (FOM) of 2183 RIU-1. This sensor can detect temperature fluctuations with a temperature sensitivity of 59.5 pm/k. The proposed metasurface provides a novel method to induce powerful TD resonances and offers possibilities for the design of high-performance sensors.

Two-Dimensional Chiral Metasurfaces Obtained by Geometrically Simple Meta-atom Rotations.

Two-dimensional chiral metasurfaces seem to contradict Lord Kelvin's geometric definition of chirality since they can be made to coincide by performing rotational operations. Nevertheless, most planar chiral metasurface designs often use complex meta-atom shapes to create flat versions of three-dimensional helices, although the visual appearance does not improve their chiroptical response but complicates their optimization and fabrication due to the resulting large parameter space. Here we present one of the geometrically simplest two-dimensional chiral metasurface platforms consisting of achiral dielectric rods arranged in a square lattice. Chirality is created by rotating the individual meta-atoms, making their arrangement chiral and leading to chiroptical responses that are stronger or comparable to more complex designs. We show that resonances depending on the arrangement are robust against geometric variations and behave similarly in experiments and simulations. Finally, we explain the origin of chirality and behavior of our platform by simple considerations of the geometric asymmetry and gap size.

A Centimeter-Scale Dielectric Metasurface for the Generation of Cold Atoms.

The single-beam magneto-optical trap (MOT) based on the diffractive optical element offers a new route to develop compact cold atom sources. However, the optical efficiency in the previous single-beam MOT systems is usually low and unbalanced, which will affect the quality of the trapped atoms. To solve this issue, we developed a centimeter-scale dielectric metasurface optical chip with dynamic phase distributions, which was used to split a single incident laser beam into five separate ones with well-defined polarization states and uniform energy distributions. The measured diffraction efficiency of the metasurface is up to 47%. A single-beam MOT integrated with the metasurface optical chip was then used to trap the 87Rb atoms with numbers ∼1.4 × 108 and temperatures ∼7.0 µK. The proposed concept in this work may provide a promising solution for developing ultracompact cold atom sources.

Metasurface Biosensors Enabling Single-Molecule Sensing of Cell-Free DNA.

In this study, we have revealed that highly fluorescence (FL)-enhancing all-dielectric metasurface biosensors are capable of detecting single-target DNA, which is cell-free DNA (cfDNA) specific to the human practice effect. The ultimately high-precision detection was achieved in a scheme combining the metasurface biosensors with a short-time nucleic acid amplification technique, that is, a reduced-cycle polymerase chain reaction (PCR). In this combined scheme, we obtained a series of FL signals at a single-molecule concentration, reflecting the Poisson distribution, and moreover elucidated that the FL signals exhibit the single-molecule cfDNA detection with more than 84% statistical confidence in an automated FL detection system and with 99.9% statistical confidence in confocal FL microscopy. As a result, we have found a simple and practical test to discriminate the target of 1 copy/test from zero using metasurface biosensors, which has not been realized by other elaborate techniques such as digital PCR.

Color Printing and Encryption with Polarization-Switchable Structural Colors on All-Dielectric Metasurfaces.

Metasurface-based structural color with high resolution is promising for color printing and encryption. However, achieving tunable structural colors in practical applications is challenging owing to the immutability after the fabrication of metasurfaces. Herein, we proposed the polarization-switchable dielectric metasurfaces with full colors. The colorful images can be switched on/off by controlling the polarization of incident light. For the nanorods metasurfaces, all colors turned to black in the "off" mode because of the near-zero reflection, and the uniform black was advantageous for designing encryption applications. For the nanocrosses metasurfaces, colors reversed in two different "on" modes and images hidden in the "off" mode. With the polarization-sensitive metasurfaces, a fish-bird image, an overlapped dual-channel image, and a green-red heart image were obtained, respectively. The demonstrations can be applied to dynamic displays, optical cryptography, multichannel imaging, and optical data storage.

Phase Interrogation Sensor Based on All-Dielectric BIC Metasurface.

The low performance of sensors based on an all-dielectric metasurface limits their application compared to metallic counterparts. Here, for the first time, an all-dielectric BIC (bound states in the continuum) metasurface is employed for highly sensitive phase interrogation refractive index sensing. The proposed sensor is well analyzed, fabricated, and characterized. Experimentally, a high-performance BIC-based microfluidic sensing chip with a Q factor of 1200 is achieved by introducing symmetry breaking. A refractive index sensor with high figure of merit of 418 RIU-1 is demonstrated, which is beneficial to the phase interrogation. Notably, we measure a record phase interrogation sensitivity of 2.7 × 104 deg/RIU to the refractive index, thus enabling the all-dielectric BIC to rival the refractive index detection capabilities of metal-based sensors such as surface plasmon resonance. This scheme establishes a pivotal role of the all-dielectric metasurface in the field of ultrahigh sensitivity sensors and opens possibilities for trace detection in biochemical analysis and environment monitoring.

Dielectric metasurfaces for next-generation optical biosensing: a comparison with plasmonic sensing.

In the past decades, nanophotonic biosensors have been extended from the extensively studied plasmonic platforms to dielectric metasurfaces. Instead of plasmonic resonance, dielectric metasurfaces are based on Mie resonance, and provide comparable sensitivity with superior resonance bandwidth, Q factor, and figure-of-merit. Although the plasmonic photothermal effect is beneficial in many biomedical applications, it is a fundamental limitation for biosensing. Dielectric metasurfaces solve the ohmic loss and heating problems, providing better repeatability, stability, and biocompatibility. We review the high-Q resonances based on various physical phenomena tailored by meta-atom geometric designs, and compare dielectric and plasmonic metasurfaces in refractometric, surface-enhanced, and chiral sensing for various biomedical and diagnostic applications. Departing from conventional spectral shift measurement using spectrometers, imaging-based and spectrometer-less biosensing are highlighted, including single-wavelength refractometric barcoding, surface-enhanced molecular fingerprinting, and integrated visual reporting. These unique modalities enabled by dielectric metasurfaces point to two important research directions. On the one hand, hyperspectral imaging provides massive information for smart data processing, which not only achieve better biomolecular sensing performance than conventional ensemble averaging, but also enable real-time monitoring of cellular or microbial behaviour in physiological conditions. On the other hand, a single metasurface can integrate both functions of sensing and optical output engineering, using single-wavelength or broadband light sources, which provides simple, fast, compact, and cost-effective solutions. Finally, we provide perspectives in future development on metasurface nanofabrication, functionalization, material, configuration, and integration, towards next-generation optical biosensing for ultra-sensitive, portable/wearable, lab-on-a-chip, point-of-care, multiplexed, and scalable applications.

Engineering Electromagnetic Field Distribution and Resonance Quality Factor Using Slotted Quasi-BIC Metasurfaces.

Dielectric metasurfaces governed by bound states in the continuum (BIC) are actively investigated for achieving high-quality factors and strong electromagnetic field enhancements. Traditional approaches reported for tuning the performance of quasi-BIC metasurfaces include tuning the resonator size, period, and structure symmetry. Here we propose and experimentally demonstrate an alternative approach through engineering slots within a zigzag array of elliptical silicon resonators. Through analytical theory, three-dimensional electromagnetic modeling, and infrared spectroscopy, we systematically investigate the spectral responses and field distributions of the slotted metasurface in the mid-IR. Our results show that by introducing slots, the electric field intensity enhancement near the apex and the quality factor of the quasi-BIC resonance are increased by a factor of 2.1 and 3.3, respectively, in comparison to the metasurface without slots. Furthermore, the slotted metasurface also provides extra regions of electromagnetic enhancement and confinement, which holds enormous potential in particle trapping, sensing, and emission enhancement.

Polarization-Dependent All-Dielectric Metasurface for Single-Shot Quantitative Phase Imaging.

Phase retrieval is a noninterferometric quantitative phase imaging technique that has become an essential tool in optical metrology and label-free microscopy. Phase retrieval techniques require multiple intensity measurements traditionally recorded by camera or sample translation, which limits their applicability mostly to static objects. In this work, we propose the use of a single polarization-dependent all-dielectric metasurface to facilitate the simultaneous recording of two images, which are utilized in phase calculation based on the transport-of-intensity equation. The metasurface acts as a multifunctional device that splits two orthogonal polarization components and adds a propagation phase shift onto one of them. As a proof-of-principle, we demonstrate the technique in the wavefront sensing of technical samples using a standard imaging setup. Our metasurface-based approach fosters a fast and compact configuration that can be integrated into commercial imaging systems.

Tailoring Third-Harmonic Diffraction Efficiency by Hybrid Modes in High-Q Metasurfaces.

Metasurfaces are versatile tools for manipulating light; however, they have received little attention as devices for the efficient control of nonlinearly diffracted light. Here, we demonstrate nonlinear wavefront control through third-harmonic generation (THG) beaming into diffraction orders with efficiency tuned by excitation of hybrid Mie-quasi-bound states in the continuum (BIC) modes in a silicon metasurface. Simultaneous excitation of the high-Q collective Mie-type modes and quasi-BIC modes leads to their hybridization and results in a local electric field redistribution. We probe the hybrid mode by measuring far-field patterns of THG and observe the strong switching between (0,-1) and (-1,0) THG diffraction orders from 1:6 for off-resonant excitation to 129:1 for the hybrid mode excitation, showing tremendous contrast in controlling the nonlinear diffraction patterns. Our results pave the way to the realization of metasurfaces for novel light sources, telecommunications, and quantum photonics.

Simultaneous Measurements of Refractive Index and Methane Concentration through Electromagnetic Fano Resonance Coupling in All-Dielectric Metasurface.

Dual-parameter measurements of refractive index and methane concentration based on electromagnetic Fano resonance are proposed. Two independent Fano resonances can be produced through electric dipole and toroidal dipole resonance in an all-dielectric metasurface separately. The linear relationship between the spectral peak-shifts and the parameters to be measured will be obtained directly. The refractive index (RI) sensitivity and gas sensitivity are 1305.6 nm/refractive index unit (RIU), -0.295 nm/% for one resonance peak (dip1), and 456.6 nm/RIU, -0.61 nm/% for another resonance peak (dip2). Such a metasurface has simpler structure and higher sensitivity, which is beneficial for environmental gas monitoring or multi-parameter measurements.

Metasurface Integrated Monolayer Exciton Polariton.

Monolayer transition-metal dichalcogenides (TMDs) are the first truly two-dimensional (2D) semiconductor, providing an excellent platform to investigate light-matter interaction in the 2D limit. The inherently strong excitonic response in monolayer TMDs can be further enhanced by exploiting the temporal confinement of light in nanophotonic structures. Here, we demonstrate a 2D exciton-polariton system by strongly coupling atomically thin tungsten diselenide (WSe2) monolayer to a silicon nitride (SiN) metasurface. Via energy-momentum spectroscopy of the WSe2-metasurface system, we observed the characteristic anticrossing of the polariton dispersion both in the reflection and photoluminescence spectrum. A Rabi splitting of 18 meV was observed which matched well with our numerical simulation. Moreover, we showed that the Rabi splitting, the polariton dispersion, and the far-field emission pattern could be tailored with subwavelength-scale engineering of the optical meta-atoms. Our platform thus opens the door for the future development of novel, exotic exciton-polariton devices by advanced meta-optical engineering.

All-Dielectric Silicon Nanoring Metasurface for Full-Color Printing.

Structural color has been particularly attractive as it provides a highly promising approach for next-generation color printing. Plasmonic nanostructures have been intensively investigated for color printing, while suffering from intrinsic loss that degrades the quality of the coloration. Dielectric materials have emerged as an alternative because of their high refractive index that enables highly confined optical modes within the nanostructure at the diffraction limit. Here, we demonstrate an all-dielectric nanoring metasurface for coloration. By harnessing the intrinsic nanoring structure design, vivid structural color has been achieved in the visible range. The color gamut is expected to occupy 115% of the standard color space (sRGB) on the chromaticity diagram of the International Commission on Illumination (CIE) 1931 in theory. Our structure can be applied to various complex devices and materials and find potential applications such as displays, information, and art works.

Nonlinear Imaging with All-Dielectric Metasurfaces.

Nonlinear metasurfaces incorporate many of the functionalities of their linear counterparts such as wavefront shaping, but simultaneously they perform nonlinear optical transformations. This dual functionality leads to a rather unintuitive physical behavior which is still widely unexplored for many photonic applications. The nonlinear processes render some basic principles governing the functionality of linear metasurfaces. Exemplarily, the superposition principle and the geometric optics approximation become not directly applicable to nonlinear metasurfaces. On the other hand, nonlinear metasurfaces facilitate new phenomena that are not possible in the linear regime. Here, we study the imaging of objects through a dielectric nonlinear metalens. We illuminate objects by infrared light and record their generated images at the visible third-harmonic wavelengths. We revisit the classical lens theory and suggest a generalized Gaussian lens equation for nonlinear imaging, verified both experimentally and analytically. We also demonstrate experimentally higher-order spatial correlations facilitated by the nonlinear metalens, resulting in additional image features.

Ultrahighly Saturated Structural Colors Enhanced by Multipolar-Modulated Metasurfaces.

Colors with high saturation are of prime significance for display and imaging devices. So far, structural colors arising from all-dielectric metasurfaces, particularly amorphous silicon and titanium oxide, have exceeded the gamut of standard RGB (sRGB) space. However, the excitation of higher-order modes for dielectric materials hinders the further increase of saturation. Here, to address the challenge, we propose a new design strategy of multipolar-modulated metasurfaces with multi-dielectric stacked layers to realize the deep modulation of multipolar modes. Index matching between layers can suppress the multipolar modes at nonresonant wavelength, resulting in the dramatic enhancement in the monochromaticity of reflection spectra. Ultrahigh-saturation colors ranging from 70% to 90% with full hue have been theoretically and experimentally obtained. The huge gamut space can be realized in an unprecedented way, taking up 171% sRGB space, 127% Adobe RGB space, and 57% CIE space. More interestingly, the coverage for Recommendation 2020 (Rec. 2020) space, which almost has not been successfully realized so far, can reach 90%. We anticipate that the proposed multipolar-modulated metasurfaces are promising for the enlargement of the color range for high-end and advanced display applications.

Simultaneous Spectral and Spatial Modulation for Color Printing and Holography Using All-Dielectric Metasurfaces.

Metasurfaces possess the outstanding ability to tailor phase, amplitude, and even spectral responses of light with an unprecedented ultrahigh resolution and thus have attracted significant interest. Here, we propose and experimentally demonstrate a novel meta-device that integrates color printing and computer-generated holograms within a single-layer dielectric metasurface by modulating spectral and spatial responses at subwavelength scale, simultaneously. In our design, such metasurface appears as a microscopic color image under white light illumination, while encrypting two different holographic images that can be projected at the far-field when illuminated with red and green laser beams. We choose amorphous silicon dimers and nanofins as building components and use a modified parallel Gerchberg-Saxton algorithm to obtain multiple subholograms with arbitrary spatial shapes for image-indexed arrangements while avoiding the loss of phase information. Such a method can further extend the design freedom of metasurfaces. By exploiting spectral and spatial control at the level of individual pixels, multiple sets of independent information can be introduced into a single-layer device; the additional complexity and enlarged information capacity are promising for novel applications such as information security and anticounterfeiting.

Reversible Image Contrast Manipulation with Thermally Tunable Dielectric Metasurfaces.

Increasing demand for higher resolution of miniaturized displays requires techniques achieving high contrast tunability of the images. Employing metasurfaces for image contrast manipulation is a new and rapidly growing field of research aiming to address this need. Here, a new technique to achieve image tuning in a reversible fashion is demonstrated by dielectric metasurfaces composed of subwavelength resonators. It is demonstrated that by controlling the temperature of a metasurface the encoded transmission pattern can be tuned. To this end, two sets of nanoresonators composed of nonconcentric silicon disks with a hole that exhibit spectrally sharp Fano resonances and forming a Yin-Yang pattern are designed and fabricated. Through exploitation of the thermo-optical properties of silicon, full control of the contrast of the Yin-Yang image is demonstrated by altering the metasurface temperature by ΔT ≈ 100 °C. This is the first demonstrated technique to control an image contrast by temperature. Importantly, the turning technique does not require manipulating the external stimulus, such as polarization or angle of the illumination and/or the refractive index of this environment. These results open many opportunities for transparent displays, optical switches, and tunable illumination systems.

Nonreciprocal Flat Optics with Silicon Metasurfaces.

Metasurfaces enable almost complete control of light through ultrathin, subwavelength surfaces by locally and abruptly altering the scattered phase. To date, however, all metasurfaces obey time-reversal symmetry, meaning that forward and backward traveling waves will trace identical paths when being reflected, refracted, or diffracted. Here, we use full-field calculations to design a passive metasurface for nonreciprocal transmission of both direct and anomalously refracted near-infrared light over nanoscale optical path lengths. The metasurface consists of a 100 nm-thick, periodically patterned Si slab. Owing to the high-quality-factor resonances of the metasurface and the inherent Kerr nonlinearities of Si, this structure acts as an optical diode for free-space optical signals. This structure also exhibits nonreciprocal anomalous refraction with appropriate patterning to form a phase gradient metasurface. Compared to existing schemes for breaking time-reversal symmetry, our platform enables subwavelength nonreciprocity for arbitrary free-space optical inputs and provides a straightforward path to experimental realization. The concept is also generalizable to other metasurface functions, providing a foundation for one-way lensing and holography.