Pulsed Airstream-Driven Hierarchical Micro-Nano Pore Structured Triboelectric Nanogenerator for Wireless Self-Powered Formaldehyde Sensing.

Formaldehyde (HCHO), as a common volatile organic compound, has a serious impact on human health in the daily lives and industrial production scenarios. Given the security issue of HCHO detection and danger warning, a ZIF-8/copper foam based pulsed airstream-driven triboelectric nanogenerator (ZCP-TENG) is designed to develop the self-powered HCHO sensors. By combining contact electrification and electrostatic induction, the ZCP-TENG can be utilized for airflow energy harvesting and HCHO concentration detection. The short-circuit current and output power of the ZCP-TENG can reach 2.0 µA and 81 µW (20 ppm). With the high surface area, abundant micro-nano pores, and excellent permeation flux, the ZCP-TENGs exhibit excellent HCHO sensing response (61.3% at 100 ppm), low detection limit (≈2 ppm), and rapid response/recovery time (14/15 s), which can be served as a highly sensitive and selective HCHO sensor. By connecting an intelligent wireless alarm, the ZCP-TENGs are designed to construct a self-powered warning system to monitor and remind the HCHO of exceedance situations. Moreover, by combining a support vector machine model, the difference concentrations can be quickly identified with an average prediction accuracy of 100%. This study illustrates that ZCP-TENGs have broad application prospects and provide guidance for HCHO monitoring and danger warnings.

Hydrosilylation Adducts to Produce Wide-Temperature Flexible Polysiloxane Aerogel under Ambient Temperature and Pressure Drying.

Despite incorporation of organic groups into silica-based aerogels to enhance their mechanical flexibility, the wide temperature reliability of the modified silicone aerogel is inevitably degraded. Therefore, facile synthesis of soft silicone aerogels with wide-temperature stability remains challenging. Herein, novel silicone aerogels containing a high content of Si are reported by using polydimethylvinylsiloxane (PDMVS), a hydrosilylation adduct with water-repellent groups, as a "flexible chain segment" embedded within the aerogel network. The poly(2-dimethoxymethylsilyl)ethylmethylvinylsiloxane (PDEMSEMVS) aerogel is fabricated through a cost-effective ambient temperature/pressure drying process. The optimized aerogel exhibits exceptional performance, such as ultra-low density (50 mg cm-3), wide-temperature mechanical flexibility, and super-hydrophobicity, in comparison to the previous polysiloxane aerogels. A significant reduction in the density of these aerogels is achieved while maintaining a high crosslinking density by synthesizing gel networks with well-defined macromolecules through hydrolytic polycondensation crosslinking of PDEMSEMVS. Notably, the pore/nanoparticle size of aerogels can be fine-tuned by optimizing the gel solvent type. The as-prepared silicone aerogels demonstrate selective absorption, efficient oil-water separation, and excellent thermal insulation properties, showing promising applications in oil/water separation and thermal protection.

Regional Control of Multistimuli-Responsive Structural Color-Switching Surfaces by a Micropatterned DNA-Hydrogel Assembly.

Structural colors have advantages compared with chemical pigments or dyes, such as iridescence, tunability, and unfading. Many studies have focused on developing the ability to switch ON/OFF the structural color; however, they often suffer from a simple and single stimulus, remaining structural colors, and target selectivity. Herein, we present regionally controlled multistimuli-responsive structural color switching surfaces. The key part is the utilization of a micropatterned DNA-hydrogel assembly on a single substrate. Each hydrogel network contains a unique type of stimuli-responsive DNA motifs as an additional cross-linker to exhibit swelling/deswelling via stimuli-responsive DNA interactions. The approach enables overcoming the existing limitations and selectively programming the DNA-hydrogel to a decrypted state (ON) and an encrypted state (OFF) in response to multiple stimuli. Furthermore, the transitions are reversible, providing cyclability. We envision the potential of our method for diverse applications, such as sensors or anticounterfeiting, requiring multistimuli-responsive structural color switching surfaces.

Artificial neural network for cytocompatibility and antibacterial enhancement induced by femtosecond laser micro/nano structures.

The failure of orthopedic and dental implants is mainly caused by biomaterial-associated infections and poor osseointegration. Surface modification of biomedical materials plays a significant role in enhancing osseointegration and anti-bacterial infection. In this work, a non-linear relationship between the micro/nano surface structures and the femtosecond laser processing parameters was successfully established based on an artificial neural network. Then a controllable functional surface with silver nanoparticles (AgNPs) to was produced to improve the cytocompatibility and antibacterial properties of biomedical titanium alloy. The surface topography, wettability, and Ag+ release were carefully investigated. The effects of these characteristics on antibacterial activity and cytocompatibilty were also evaluated. Results show that the prepared surface is hydrophobic, which can prevent the burst release of Ag+ in the initial stage. The prepared surface also shows both good cytocompatibility toward the murine calvarial preosteoblasts MC3T3-E1 cells (derived from Mus musculus (mouse) calvaria) and good antibacterial effects against Gram-negative (E. coli) and Gram-positive (S. aureus) bacteria, which is caused by the combined effect of appropriate micro/nano-structured feature and reasonable Ag+ release rate. We do not only clarify the antibacterial mechanism but also demonstrate the possibility of balancing the antibacterial and osteointegration-promoting properties by micro/nano-structures. The reported method offers an effective strategy for the patterned surface modification of implants.

mTORC2 regulates hierarchical micro/nano topography-induced osteogenic differentiation via promoting cell adhesion and cytoskeletal polymerization.

Surface topography acts as an irreplaceable role in the long-term success of intraosseous implants. In this study, we prepared the hierarchical micro/nano topography using selective laser melting combined with alkali heat treatment (SLM-AHT) and explored the underlying mechanism of SLM-AHT surface-elicited osteogenesis. Our results show that cells cultured on SLM-AHT surface possess the largest number of mature FAs and exhibit a cytoskeleton reorganization compared with control groups. SLM-AHT surface could also significantly upregulate the expression of the cell adhesion-related molecule p-FAK, the osteogenic differentiation-related molecules RUNX2 and OCN as well as the mTORC2 signalling pathway key molecule Rictor. Notably, after the knocked-down of Rictor, there were no longer significant differences in the gene expression levels of the cell adhesion-related molecules and osteogenic differentiation-related molecules among the three titanium surfaces, and the cells on SLM-AHT surface failed to trigger cytoskeleton reorganization. In conclusion, the results suggest that mTORC2 can regulate the hierarchical micro/nano topography-mediated osteogenesis via cell adhesion and cytoskeletal reorganization.

Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review.

Template methods are regarded as an important method for micro-nano processing in the active layer of flexible tactile sensors. These template methods use physical/chemical processes to introduce micro-nano structures on the active layer, which improves many properties including sensitivity, response/recovery time, and detection limit. However, since the processing process and applicable conditions of the template method have not yet formed a perfect system, the development and commercialization of flexible tactile sensors based on the template method are still at a relatively slow stage. Despite the above obstacles, advances in microelectronics, materials science, nanoscience, and other disciplines have laid the foundation for various template methods, enabling the continuous development of flexible tactile sensors. Therefore, a comprehensive and systematic review of flexible tactile sensors based on the template method is needed to further promote progress in this field. Here, the unique advantages and shortcomings of various template methods are summarized in detail and discuss the research progress and challenges in this field. It is believed that this review will have a significant impact on many fields of flexible electronics, which is beneficial to promote the cross-integration of multiple fields and accelerate the development of flexible electronic devices.

Fabrication and Performance of Graphene Flexible Pressure Sensor with Micro/Nano Structure.

Laser-induced graphene (LIG) has been widely used in flexible sensors due to its excellent mechanical properties and high conductivity. In this paper, a flexible pressure sensor prepared by bionic micro/nanostructure design and LIG mass fraction regulation is reported. First, prepared LIG and conductive carbon paste (CCP) solutions were mixed to obtain a conductive polymer. After the taro leaf structure was etched on the surface of the aluminum alloy plate by Nd:YAG laser processing, the conductive polymer was evenly coated on the template. Pressure sensors were packaged with a stencil transfer printing combined with an Ecoflex flexible substrate. Finally, the effects of different laser flux and the proportion of LIG in the composite on the sensitivity of the sensor are discussed. The results show that when the laser flux is 71.66 J·cm-2 and the mass fraction of LIG is 5%, the sensor has the best response characteristics, with a response time and a recovery time of 86 ms and 101 ms, respectively, with a sensitivity of 1.2 kPa-1 over a pressure range of 0-6 kPa, and stability of 650 cycle tests. The LIG/CCP sensor with a bionic structure demonstrates its potential in wearable devices.

Cell-Electrospinning and Its Application for Tissue Engineering.

Electrospinning has gained great interest in the field of regenerative medicine, due to its fabrication of a native extracellular matrix-mimicking environment. The micro/nanofibers generated through this process provide cell-friendly surroundings which promote cellular activities. Despite these benefits of electrospinning, a process was introduced to overcome the limitations of electrospinning. Cell-electrospinning is based on the basic process of electrospinning for producing viable cells encapsulated in the micro/nanofibers. In this review, the process of cell-electrospinning and the materials used in this process will be discussed. This review will also discuss the applications of cell-electrospun structures in tissue engineering. Finally, the advantages, limitations, and future perspectives will be discussed.

Structure driven bio-responsive ability of injectable nanocomposite hydrogels for efficient bone regeneration.

Injectable hydrogels are promising for treatment of bone defects in clinic owing to their minimally invasive procedure. Currently, there is limited emphasis on how to utilize injectable hydrogels to mobilize body's regenerative potential for enhancing bone regeneration. Herein, an injectable bone-mimicking hydrogel (BMH) scaffold assembled from nanocomposite microgel building blocks was developed, in which a highly interconnected microporous structure and an inorganic/organic (methacrylated hydroxyapatite and methacrylated gelatin) interweaved nano structure were well-designed. Compared with hydrogels lacking micro-nano structures or only showing microporous structure, the BMH scaffold enhanced the ingrowth of vessels and promoted the formation of dense cellular networks (including stem cells and M2 macrophages), across the entire scaffold at early stage after subcutaneous implantation. Moreover, the BMH scaffold could not only directly trigger osteogenic differentiation of the infiltrated stem cells, but also provided an instructive osteo-immune microenvironment by inducing macrophages into M2 phenotype. Mechanistically, our results reveal that the nano-rough structure of the BMH plays an essential role in inducing macrophage M2 polarization through activating mechanotransduction related RhoA/ROCK2 pathway. Overall, this work offers an injectable hydrogel with micro-nano structure driven bio-responsive abilities, highlighting harnessing body's inherent regenerative potential to realize bone regeneration.

Advanced Functional Electromagnetic Shielding Materials: A Review Based on Micro-Nano Structure Interface Control of Biomass Cell Walls.

Research efforts on electromagnetic interference (EMI) shielding materials have begun to converge on green and sustainable biomass materials. These materials offer numerous advantages such as being lightweight, porous, and hierarchical. Due to their porous nature, interfacial compatibility, and electrical conductivity, biomass materials hold significant potential as EMI shielding materials. Despite concerted efforts on the EMI shielding of biomass materials have been reported, this research area is still relatively new compared to traditional EMI shielding materials. In particular, a more comprehensive study and summary of the factors influencing biomass EMI shielding materials including the pore structure adjustment, preparation process, and micro-control would be valuable. The preparation methods and characteristics of wood, bamboo, cellulose and lignin in EMI shielding field are critically discussed in this paper, and similar biomass EMI materials are summarized and analyzed. The composite methods and fillers of various biomass materials were reviewed. this paper also highlights the mechanism of EMI shielding as well as existing prospects and challenges for development trends in this field.

Corrosive effect on saturated pool boiling heat transfer characteristics of metallic surfaces with hierarchical micro/nano structures.

Surface modification is of critical interest to enhance boiling heat transfer in terms of heat transfer coefficient or critical heat flux (CHF), which is significantly affected by distinct surface morphology and wettability and it can improve the efficiency and safety of equipment. Furthermore, actual service environment may cause severe corrosion to the processed structured surfaces while its consequence on boiling heat transfer is still obscure. In this article, comprehensive researches are conducted to unravel corrosive effect on metallic samples made of stainless steel (SS) and Inconel materials with microstructures. Different constructions (i.e., microgroove, microcavity and micropillar array) and characteristic dimensions (∼20, 50 µm) of microstructure, various duration time (up to 300 days) and pH values (∼7.0-8.5) of corrosive environment are compared thoroughly. Conclusions can be drawn that not all microstructures can enhance pool boiling heat transfer characteristics, especially in terms of CHF values. More importantly, CHF value of SS microgroove sample firstly increases from 60.94 to 94.09 W·cm-2 in 50 days, then decreases to 47.77 W·cm-2 in 300 days, which can be attributed to competition result between formation of hierarchical micro/nano structure with enhancing wicking capability and chemistry condition with increasing contact angle. In addition, distinct bubble dynamics during pool boiling is also analyzed. The insights obtained from this article can be used to guide surface modification method and to reveal evolvement rule of engineered metallic surface in highly corrosive and harsh boiling heating transfer environment.

Reusable mechano-bactericidal surface with echinoid-shaped hierarchical micro/nano-structure.

Biofilms formed owing to the attachment of bacteria to surfaces have caused various problems in industries such as marine transportation/logistics and medicine. In response, many studies have been conducted on bactericidal surfaces, and nanostructured surfaces mimicking cicada and dragonfly wings are emerging as candidates for mechano-bactericidal surfaces. In specific circumstances involving mechano-bactericidal activity, certain nanostructured surfaces could exhibit their bactericidal effects by directly deforming the membranes of bacteria that adhere to these nanostructures. Additionally, in most cases, debris of bacterial cells may accumulate on these nanostructured surfaces. Such accumulation poses a significant challenge: it diminishes the mechano-bactericidal effectiveness of the surface, as it hinders the direct interaction between the nanostructures and any new bacteria that attach subsequently. In specific circumstances involving mechano-bactericidal activity, certain nanostructured surfaces could exhibit their bactericidal effects by directly deforming the membranes of bacteria that adhere to these nanostructures. Additionally, in most cases, debris of bacterial cells may accumulate on these nanostructured surfaces. Such accumulation poses a significant challenge: it diminishes the mechano-bactericidal effectiveness of the surface, as it hinders the direct interaction between the nanostructures and any new bacteria that attach subsequently.In other words, there is a need for strategies to remove the accumulated bacterial debris in order to sustain the mechano-bactericidal effect of the nanostructured surface. In this study, hierarchical micro/nano-structured surface (echinoid-shaped nanotextures were formed on Al micro-particle's surfaces) was fabricated using a simple pressure-less sintering method, and effective bactericidal efficiency was shown against E. coli (97 ± 3.81%) and S. aureus (80 ± 9.34%). In addition, thermal cleaning at 500 °C effectively eliminated accumulated dead bacterial debris while maintaining the intact Al2O3 nanostructure, resulting in significant mechano-bactericidal activity (E. coli: 89 ± 6.86%, S. aureus: 75 ± 8.31%). As a result, thermal cleaning maintains the intact nanostructure and allows the continuance of the mechano-bactericidal effect. This effect was consistently maintained even after five repetitive use (E. coli: 80 ± 16.26%, S. aureus: 76 ± 12.67%).

Flexible Janus wood membrane with asymmetric wettability for high-efficient switchable oil/water emulsion separation.

Janus membranes have attracted much attention for switchable oil/water separation because they have opposite wetting behavior on each side. However, it remains a challenge to fabricate Janus membranes with asymmetric wettability from biomass by simple methods. Herein, we prepared a flexible Janus wood (JW) membrane by cutting the natural wood along the longitudinal direction, followed by a facile top-down approach. The hydrophobic lignin was removed from the wood to prepare a highly porous and superhydrophilic wood (SW) with underwater superoleophobicity. Then, one side of the SW was sprayed with a mixture of 1H,1H,2H,2H-perfluorooctyltrichlorosilane/SiO2 nanoparticles to form a superhydrophobic surface that hardly affected the wettability of the other side. The obtained JW membrane maintains its selective wettability in harsh environments owing to its durability and stability. Furthermore, it has a switchable, high separation efficiency of >99% for both oil-in-water and water-in-oil emulsions, which can be attributed to the unique wettability and hierarchical micro/nano structure of the JW membrane. Notably, the three-dimensional interconnected micro/nanochannels (pits and nanopores) of the JW membrane are beneficial to the size-sieving effect during emulsion separation. At the same time, the layered channels (tracheids and vessels) enable multiple separations. JW membrane is sustainable, inexpensive, stable, and easy to manufacture, providing more implications for the innovation of biomass-based Janus separation materials in industrial wastewater treatment.

Generation of Nano-Bubbles by NaHCO3 for Improving the FO Membrane Performance.

Thin-film composite (TFC) polyamide membranes have a wide range of applications in forward osmosis, but tuning the water flux remains a significant challenge due to concentration polarization. The generation of nano-sized voids within the polyamide rejection layer can change the roughness of the membrane. In this experiment, the micro-nano structure of the PA rejection layer was adjusted by adding sodium bicarbonate to the aqueous phase to generate nano-bubbles, and the changes of its roughness with the addition of sodium bicarbonate were systematically demonstrated. With the enhanced nano-bubbles, more and more blade-like and band-like features appeared on the PA layer, which could effectively reduce the reverse solute flux of the PA layer and improve the salt rejection of the FO membrane. The increase in roughness raised the area of the membrane surface, which led to a larger area for concentration polarization and reduced the water flux. This experiment demonstrated the variation of roughness and water flux, providing an effective idea for the preparation of high-performance FO membranes.

Oxidation-Resistant Silicon Nanosystem for Intelligent Controlled Ferrous Foliar Delivery to Crops.

Since ferrous (Fe(II)) is the main form of plant absorption, traditional ferrous foliar fertilizers (TFFF) are widely used in modern agriculture. However, TFFF suffer from the shortcomings of weak antioxidant capacity (AC), low foliar adhesion efficiency (FAE), poor fertilizer utilization efficiency (FUE), and noncontrollable slow-release behavior. To overcome these limitations, an oxidation-resistant silicon nanosystem for intelligent controlled ferrous foliar delivery to crops was first developed by using environmentally friendly micro/nano structured hollow silicon as carrier, and combining with vitamin C (in situ antioxidant) to synthesize an oxidation-resistant ferrous foliar fertilizer (ORFFF) for ameliorating Fe-deficiency in crops and increasing crop yield. Compared with TFFF, the ORFFF has excellent ferrous AC (only 11.5% of Fe(II) was oxidized in ORFFF within 72 h), ultrahigh FAE (∼84% of adhesion percentage (%) after two-times simulated rain rinsing), nutrient slow-release ability (720 h gradually release 100.6 mg·g-1), pH-controlled release ability (pH 3-8), and verified high biological safety (100% survival rate for zebrafish and earthworm). The pot experiments showed that ORFFF can correct the Fe-deficiency symptoms of tomato seedlings promptly compared with TFFF, and the FUE of ORFFF is 4.2 times that of TFFF. The specific pH responsiveness of ORFFF can control the slow-release rate of Fe(II) to satisfy the needs of Fe in varying crops and different growing periods of crops. This work provides a feasible way to achieve green and safe Fe supplementation for crops, reduce Fe fertilizer waste, avoid soil pollution caused by Fe fertilizer abuse, and promote the sustainable development of modern nanoagriculture.

Enhanced performance of organic light-emitting diodes by integrating quasi-periodic micro-nano structures.

To integrate a quasi-periodic micro-nano structure (PMS) to the organic light-emitting devices (OLEDs) is an efficient way to enhance the performance of OLEDs. In this paper, the PMS prepared by the phase separation of Polystyrene and Poly (methyl methacrylate) was integrated to the OLEDs with the structures of Glass/PMS/Ag (30 nm)/MoO3 (5 nm)/(NPB) (40 nm)/(Alq3) (60 nm)/LiF (0.5 nm)/Al (150 nm). The maximum luminance intensity and external quantum efficiency increased to 10700 cd/m2 and 1.11 %, which is 48 % and 44 % higher than that of 7209 cd/m2 and 0.77 % of the planar reference device. The enhanced performance of OLEDs was ascribed to the attenuation of surface plasmon polariton loss caused by the PMS, which was testified by the Finite-Difference Time-Domain (FDTD) simulation. The PMS was also transferred to the hole transfer layer (PEDOT: PSS) of OLEDs by nano-imprinting lithography with the structure of Glass/(ITO) (100 nm)/PEDOT: PSS (100 nm) (with PMS)/NPB (10 nm)/Alq3 (50 nm)/LiF (0.5 nm)/Al (100 nm). The performance was also improved by the optimized PMS and the light out-coupling efficiency increased to about 49.5 %, which is much higher than that of 28.8 % in the OLEDs with PMS Ag anode and 20 % in the planar reference devices. This suggests that the PMS can improve the OLED device performance regardless of the functional layer in which the PMS is integrated.

Multifunctional Biomimetic Composite Coating with Antireflection, Self-Cleaning and Mechanical Stability.

Antireflective and self-cleaning coatings have attracted increasing attention in the last few years due to their promising and wider applications such as stealth, display devices, sensing, and other fields. However, existing antireflective and self-cleaning functional material are facing problems such as difficult performance optimization, poor mechanical stability, and poor environmental adaptability. Limitations in design strategies have severely restricted coatings' further development and application. Fabrication of high-performance antireflection and self-cleaning coatings with satisfactory mechanical stability remain a key challenge. Inspired by the self-cleaning performance of nano-/micro-composite structure on natural lotus leaves, SiO2/PDMS/matte polyurethane biomimetic composite coating (BCC) was prepared by nano-polymerization spraying technology. The BCC reduced the average reflectivity of the aluminum alloy substrate surface from 60% to 10%, and the water contact angle (CA) was 156.32 ± 0.58°, illustrating the antireflective and self-cleaning performance of the surface was significantly improved. At the same time, the coating was able to withstand 44 abrasion tests, 230 tape stripping tests, and 210 scraping tests. After the test, the coating still showed satisfactory antireflective and self-cleaning properties, indicating its remarkable mechanical stability. In addition, the coating also displayed excellent acid resistance, which has important value in aerospace, optoelectronics, industrial anti-corrosion, etc.

Multifunctional Perovskite Photodetectors: From Molecular-Scale Crystal Structure Design to Micro/Nano-scale Morphology Manipulation.

Multifunctional photodetectors boost the development of traditional optical communication technology and emerging artificial intelligence fields, such as robotics and autonomous driving. However, the current implementation of multifunctional detectors is based on the physical combination of optical lenses, gratings, and multiple photodetectors, the large size and its complex structure hinder the miniaturization, lightweight, and integration of devices. In contrast, perovskite materials have achieved remarkable progress in the field of multifunctional photodetectors due to their diverse crystal structures, simple morphology manipulation, and excellent optoelectronic properties. In this review, we first overview the crystal structures and morphology manipulation techniques of perovskite materials and then summarize the working mechanism and performance parameters of multifunctional photodetectors. Furthermore, the fabrication strategies of multifunctional perovskite photodetectors and their advancements are highlighted, including polarized light detection, spectral detection, angle-sensing detection, and self-powered detection. Finally, the existing problems of multifunctional detectors and the perspectives of their future development are presented.

Electrospun Nanofiber Covered Polystyrene Micro-Nano Hybrid Structures for Triboelectric Nanogenerator and Supercapacitor.

Recently, tremendous research on small energy supply devices is gaining popularity with the immerging Internet of Things (IoT) technologies. Especially, energy conversion and storage devices can provide opportunities for small electronics. In this research, a micro-nano structured design of electrodes is newly developed for high performing hybrid energy systems with the improved effective surface area. Further, it could be simply fabricated through two-steps synthesis of electrospinning and glass transition of a novel polystyrene (PS) substrate. Herein, the electro-spun nanofiber of polyacrylonitrile (PAN) and Nylon 66 (Nylon) are applied to the dielectric layer of a triboelectric generator (TENG), while the PAN and polyaniline (PANI) composites is utilized as an electroactive material of supercapacitor (SC). As a result, the self-charging power system is successfully integrated with the wrinkled PAN/PS (W-PAN/PS@PANI)-SC and W-TENG by using a rectifier. According to the fabricated hybrid energy systems, the electrical energy produced by W-TENG can be successfully stored into as-fabricated W-PAN/PS@PANI-SC and can also turn on a commercial green LED with the stored energy. Therefore, the micro-nano structured electrode designed for hybrid energy systems can contribute to improve the energy conversion and storage performance of various electronic devices.

Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser.

Femtosecond (fs) laser processing has received great attention for preparing novel micro-nano structures and functional materials. However, the induction mechanism of the micro-nano structures induced by fs lasers still needs to be explored. In this work, the laser-induced periodic surface structure (LIPSS) of monocrystalline silicon (Si) under fs laser irradiation is investigated. Three different layers named amorphous silicon (a-Si) layer, transition layer, and unaffected Si layer are observed after laser irradiation. The a-Si layer on the surface is generated by the resolidification of melting materials. The unaffected Si layer is not affected by laser irradiation and maintains the initial atomic structure. The transition layer consisting of a-Si and unaffected Si layers was observed under the irradiated subsurface. The phase transition mechanism of Si irradiated by fs laser is "amorphous transition", with the absence of other crystal structures. A numerical model is established to describe the fs laser-Si interaction to characterize the electronic (lattice) dynamics of the LIPSS formation. The obtained results contribute to the understanding of fs laser processing of Si at the atomic scale as well as broaden the application prospects of fs laser for treating other semiconductor materials.