Cavity-resonator-integrated guided-mode resonance filter for aperture miniaturization.

ABSTRACT

A guided-mode resonance filter integrated in a waveguide cavity resonator constructed by two distributed Bragg reflectors is designed and fabricated for miniaturization of aperture size. Reflection efficiency of >90% and wavelength selectivity of 0.4 nm are predicted in the designed SiO(2)-based filter with 50-µm aperture by a numerical calculation using the finite-difference time-domain method. A maximum reflectance of 67% with 0.5-nm bandwidth is experimentally demonstrated by the fabricated device at around 850-nm wavelength.