Systematic Temperature Effects in the Argon Cluster Ion Sputter Depth Profiling of Organic Materials Using Secondary Ion Mass Spectrometry.

Seah, Martin P; Havelund, Rasmus; Gilmore, Ian S.

Seah MP; Surface and Nanoanalysis, National Physical Laboratory, Teddington, Middlesex, TW11 0LW, England, UK. martin.seah@npl.co.uk.
Havelund R; Surface and Nanoanalysis, National Physical Laboratory, Teddington, Middlesex, TW11 0LW, England, UK.
Gilmore IS; Surface and Nanoanalysis, National Physical Laboratory, Teddington, Middlesex, TW11 0LW, England, UK.

J Am Soc Mass Spectrom ; 27(8): 1411-8, 2016 08.

Article en En | MEDLINE | ID: mdl-27106601