Investigation of tip-depletion-induced fail in scanning capacitance microscopy for the determination of carrier type.

Wang, Lin; Gautier, Brice; Sabac, Andrei; Bremond, Georges.

Wang L; Institut des Nanotechnologies de Lyon (INL), Lyon University, CNRS UMR 5270, INSA Lyon, 7 avenue Jean Capelle 69621 Villeurbanne, France.
Gautier B; Institut des Nanotechnologies de Lyon (INL), Lyon University, CNRS UMR 5270, INSA Lyon, 7 avenue Jean Capelle 69621 Villeurbanne, France.
Sabac A; Institut des Nanotechnologies de Lyon (INL), Lyon University, CNRS UMR 5270, INSA Lyon, 7 avenue Jean Capelle 69621 Villeurbanne, France.
Bremond G; Institut des Nanotechnologies de Lyon (INL), Lyon University, CNRS UMR 5270, INSA Lyon, 7 avenue Jean Capelle 69621 Villeurbanne, France.

Ultramicroscopy ; 174: 46-49, 2017 03.

Article en En | MEDLINE | ID: mdl-28039762