Fiber-facet-integrated guided-mode resonance filters and sensors: experimental realization.

ABSTRACT

Guided-mode resonant (GMR) thin films integrated on fiber tips are known to realize compact filters and sensors. However, limited progress in experimental realization has been reported to date. Here we provide a considerable advance in this technology, as we experimentally demonstrate efficient fiber-facet mounted device prototypes. To retain a large aperture for convenient coupling, we design and fabricate silicon nitride-based resonators on the tip of a multimode fiber. We account for light propagation along the multimode fiber with exact numerical methods. This establishes the correct amplitude and phase distribution of the beam incident on the tip-mounted GMR element, thus enabling us to properly predict the resonance response. To fabricate the integrated GMR structures on the tips of fibers, we employ standard microfabrication processes, including holographic interference lithography and reactive-ion etching. The experimental results agree with simulation with an example device achieving high efficiency of ∼77% in transmission. To investigate fiber sensor operation, an etched silicon nitride fiber tip filter is surrounded with solutions of various refractive indices, yielding an approximate sensitivity of 200 nm/RIU.