Novel ALD Chemistry Enabled Low-Temperature Synthesis of Lithium Fluoride Coatings for Durable Lithium Anodes.

Chen, Lin; Chen, Kan-Sheng; Chen, Xinjie; Ramirez, Giovanni; Huang, Zhennan; Geise, Natalie R; Steinrück, Hans-Georg; Fisher, Brandon L; Shahbazian-Yassar, Reza; Toney, Michael F; Hersam, Mark C; Elam, Jeffrey W.

Chen KS; Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States.
Chen X; Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States.
Huang Z; Department of Mechanical and Industrial Engineering , University of Illinois at Chicago , Chicago , Illinois 60607 , United States.
Geise NR; Stanford Synchrotron Radiation Lightsource , SLAC National Accelerator Center , Menlo Park , California 94025 , United States.
Steinrück HG; Department of Chemistry , Stanford University , Stanford , California 94305 , United States.
Fisher BL; Stanford Synchrotron Radiation Lightsource , SLAC National Accelerator Center , Menlo Park , California 94025 , United States.
Toney MF; Department of Mechanical and Industrial Engineering , University of Illinois at Chicago , Chicago , Illinois 60607 , United States.
Hersam MC; Stanford Synchrotron Radiation Lightsource , SLAC National Accelerator Center , Menlo Park , California 94025 , United States.
Elam JW; Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States.