Wavelet transform-based electron tomography measurement of buried interface roughness.

Homeniuk, Darren; Malac, Marek; Hayashida, Misa

Homeniuk, Darren; Malac, Marek; Hayashida, Misa.

Homeniuk D; NRC-NANO, 11421 Saskatchewan Drive, Edmonton T6G 2M9, Canada. Electronic address: darren.homeniuk@nrc-cnrc.gc.ca.
Malac M; NRC-NANO, 11421 Saskatchewan Drive, Edmonton T6G 2M9, Canada; Department of Physics, University of Alberta, Edmonton T6G 2E1, Canada.
Hayashida M; NRC-NANO, 11421 Saskatchewan Drive, Edmonton T6G 2M9, Canada.

Ultramicroscopy ; 194: 64-77, 2018 11.

Article en En | MEDLINE | ID: mdl-30092391

Palabras clave

Defect location; Electron tomography; Film growth; Interface roughness; Root mean square (RMS) roughness; Semiconductor device; Surface roughness; Transmission electron microscope; Wavelet transform

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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2018 Tipo del documento: Article

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Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2018 Tipo del documento: Article