Precision micro-mechanical components in single crystal diamond by deep reactive ion etching. | Microsyst Nanoeng;4: 12, 2018. | MEDLINE

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Precision micro-mechanical components in single crystal diamond by deep reactive ion etching.

Toros, Adrien; Kiss, Marcell; Graziosi, Teodoro; Sattari, Hamed; Gallo, Pascal; Quack, Niels.

Toros A; 1EPFL STI IMT GR-QUACK, Station 11, CH-1015 Lausanne, Switzerland.
Kiss M; 1EPFL STI IMT GR-QUACK, Station 11, CH-1015 Lausanne, Switzerland.
Graziosi T; 1EPFL STI IMT GR-QUACK, Station 11, CH-1015 Lausanne, Switzerland.
Sattari H; 1EPFL STI IMT GR-QUACK, Station 11, CH-1015 Lausanne, Switzerland.
Gallo P; LakeDiamond SA, Rue Galilée 7, CH-1400 Yverdon-les-Bains, Switzerland.
Quack N; 1EPFL STI IMT GR-QUACK, Station 11, CH-1015 Lausanne, Switzerland.

Microsyst Nanoeng ; 4: 12, 2018.

Article en En | MEDLINE | ID: mdl-31057900

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Texto completo: 1 Banco de datos: MEDLINE Tipo de estudio: Clinical_trials Idioma: En Año: 2018 Tipo del documento: Article

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Texto completo: 1 Banco de datos: MEDLINE Tipo de estudio: Clinical_trials Idioma: En Año: 2018 Tipo del documento: Article