Selective Engineering of Chalcogen Defects in MoS<sub>2</sub> by Low-Energy Helium Plasma.

Selective Engineering of Chalcogen Defects in MoS₂ by Low-Energy Helium Plasma.

Huang, Binjie; Tian, Feng; Shen, Youde; Zheng, Minrui; Zhao, Yunshan; Wu, Jing; Liu, Yi; Pennycook, Stephen J; Thong, John T L.

Huang B; Department of Electrical and Computer Engineering , National University of Singapore , 117583 , Singapore.
Tian F; NUS Graduate School for Integrative Sciences and Engineering , National University of Singapore , 119077 , Singapore.
Shen Y; Center for Advanced 2D Materials , National University of Singapore , 117542 , Singapore.
Zheng M; Department of Electrical and Computer Engineering , National University of Singapore , 117583 , Singapore.
Zhao Y; Department of Electrical and Computer Engineering , National University of Singapore , 117583 , Singapore.
Wu J; Department of Electrical and Computer Engineering , National University of Singapore , 117583 , Singapore.
Liu Y; Institute of Materials Research and Engineering , Agency for Science Technology and Research , 138634 , Singapore.
Pennycook SJ; Department of Electrical and Computer Engineering , National University of Singapore , 117583 , Singapore.
Thong JTL; Center for Advanced 2D Materials , National University of Singapore , 117542 , Singapore.