Influence of seed layers on optical properties of aluminum in the UV range.

ABSTRACT

The potential of titanium and copper seed layers to enhance the optical properties of aluminum films for ultra-violet (UV) applications is analyzed. The seed layers significantly influence the initial layer growth of aluminum films. For the titanium-seeded aluminum, a surface roughness of 0.34 nm was observed. UV spectral reflectance measurements showed an average higher reflectivity of 4.8% for wavelengths from 120 nm to 200 nm for the aluminum film grown on the titanium seed layer. Furthermore, the titanium-seeded aluminum coatings were stable at an elevated temperature of 225°C and showed no increase in surface roughness or pinholes.