Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope.

Chen, Hua; Zhong, Yanqing.

Chen H; Smart Sensing Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Zhong Y; Smart Sensing Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

Sensors (Basel) ; 20(16)2020 Aug 14.

Article en En | MEDLINE | ID: mdl-32823993

Palabras clave

MEMS gyro; MEMS sensors; coherent demodulation; phase alignment; phase-locked loop (PLL); quadrature error; vibratory gyroscopes

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2020 Tipo del documento: Article

Texto completo: 1 Banco de datos: MEDLINE Idioma: En Año: 2020 Tipo del documento: Article