Beam shaping and probe characterization in the scanning electron microscope.

Rihácek, T; Horák, M; Schachinger, T; Mika, F; Matejka, M; Krátký, S; Fort, T; Radlicka, T; Johnson, C W; Novák, L; Sed'a, B; McMorran, B J; Müllerová, I

Rihácek, T; Horák, M; Schachinger, T; Mika, F; Matejka, M; Krátký, S; Fort, T; Radlicka, T; Johnson, C W; Novák, L; Sed'a, B; McMorran, B J; Müllerová, I.

Rihácek T; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic. Electronic address: rihacek@isibrno.cz.
Horák M; Central European Institute of Technology, Brno University of Technology, Purkynova 123, 612 00 Brno, Czech Republic.
Schachinger T; USTEM, TU Wien, Wiedner Hauptstraße 8-10, 1040 Vienna, Austria; Institute of Solid-State Physics, TU Wien, Wiedner Hauptstraße 8-10, 1040 Vienna, Austria.
Mika F; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
Matejka M; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
Krátký S; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
Fort T; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
Radlicka T; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
Johnson CW; Department of Physics, University of Oregon, Eugene, Oregon 97405, USA.
Novák L; Thermo Fisher Scientific Brno, Vlastimila Pecha 12, Brno 627 00, Czech Republic.
Sed'a B; Thermo Fisher Scientific Brno, Vlastimila Pecha 12, Brno 627 00, Czech Republic.
McMorran BJ; Department of Physics, University of Oregon, Eugene, Oregon 97405, USA.
Müllerová I; Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.