Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators.

Chen, Wen; Zhang, Linwei; Yang, Shangshu; Jia, Wenhan; Zhang, Songsong; Gu, Yuandong; Lou, Liang; Wu, Guoqiang.

Chen W; Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.
Zhang L; Shanghai Industrial Technology Research Institute, Shanghai 201899, China.
Yang S; Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.
Jia W; Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.
Zhang S; Shanghai Industrial Technology Research Institute, Shanghai 201899, China.
Gu Y; Shanghai Industrial Technology Research Institute, Shanghai 201899, China.
Lou L; Shanghai Industrial Technology Research Institute, Shanghai 201899, China.
Wu G; Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.

Micromachines (Basel) ; 12(9)2021 Sep 17.

Article en En | MEDLINE | ID: mdl-34577761