Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding.

Wang, Ziyuan; He, Changde; Zhang, Wendong; Li, Yifan; Gao, Pengfei; Meng, Yanan; Zhang, Guojun; Yang, Yuhua; Wang, Renxin; Cui, Jiangong; Wang, Hongliang; Zhang, Binzhen; Ren, Yongfeng; Zhen, Guoyong; Jiao, Xinquan; Zhang, Sai

Wang, Ziyuan; He, Changde; Zhang, Wendong; Li, Yifan; Gao, Pengfei; Meng, Yanan; Zhang, Guojun; Yang, Yuhua; Wang, Renxin; Cui, Jiangong; Wang, Hongliang; Zhang, Binzhen; Ren, Yongfeng; Zhen, Guoyong; Jiao, Xinquan; Zhang, Sai.

Wang Z; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
He C; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Zhang W; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Li Y; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Gao P; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Meng Y; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Zhang G; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Yang Y; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Wang R; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Cui J; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Wang H; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Zhang B; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Ren Y; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Zhen G; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Jiao X; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.
Zhang S; State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China.