A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration.

Liao, Zhiwei; Jing, Junmin; Gao, Rui; Guo, Yuzhen; Yao, Bin; Zhang, Huiyu; Zhao, Zhou; Zhang, Wenjun; Wang, Yonghua; Zhang, Zengxing; Xue, Chenyang.

Liao Z; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Jing J; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Gao R; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Guo Y; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Yao B; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhang H; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhao Z; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhang W; School of Aerospace Engineering, Xiamen University, Xiamen 361102, China.
Wang Y; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Zhang Z; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Xue C; State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.