Design, Simulation, and Fabrication of Multilayer Al<sub>2</sub>O<sub>3</sub> Ceramic Micro-Hotplates for High Temperature Gas Sensors.

Design, Simulation, and Fabrication of Multilayer Al₂O₃ Ceramic Micro-Hotplates for High Temperature Gas Sensors.

Tang, Bolun; Shi, Yunbo; Li, Jianwei; Tang, Jie; Feng, Qiaohua.

Tang B; Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China.
Shi Y; Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China.
Li J; Computer Vision and Intellisense Lab, School of Computer Science, University of Nottingham Ningbo China (UNNC), 199 Taikang East Road, Ningbo 315100, China.
Tang J; Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China.
Feng Q; Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China.

Sensors (Basel) ; 22(18)2022 Sep 08.

Article en En | MEDLINE | ID: mdl-36146128