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Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model.
Wan, Yin; Liu, Ding; Ren, Jun-Chao; Wu, Shi-Hai.
  • Wan Y; School of Automation and Information Engineering, Xi'an University of Technology, Xi'an 710048, China.
  • Liu D; Shaanxi Key Laboratory of Complex System Control and Intelligent Information Processing, Xi'an University of Technology, Xi'an 710048, China.
  • Ren JC; School of Automation and Information Engineering, Xi'an University of Technology, Xi'an 710048, China.
  • Wu SH; Shaanxi Key Laboratory of Complex System Control and Intelligent Information Processing, Xi'an University of Technology, Xi'an 710048, China.
Sensors (Basel) ; 23(5)2023 Mar 05.
Article en En | MEDLINE | ID: mdl-36905036
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Texto completo: 1 Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies / Risk_factors_studies Idioma: En Año: 2023 Tipo del documento: Article
Texto completo
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XML
PubMed Links
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Texto completo: 1 Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies / Risk_factors_studies Idioma: En Año: 2023 Tipo del documento: Article