A GHz Silicon-Based Width Extensional Mode MEMS Resonator with <i>Q</i> over 10,000.

A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000.

Liu, Wenli; Lu, Yujie; Chen, Zeji; Jia, Qianqian; Zhao, Junyuan; Niu, Bo; Wang, Wei; Hao, Yalu; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua.

Liu W; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Lu Y; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Chen Z; State Key Laboratory of Transducer Technology, Shanghai 200050, China.
Jia Q; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Zhao J; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Niu B; State Key Laboratory of Transducer Technology, Shanghai 200050, China.
Wang W; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Hao Y; Kunming Institute of Physics, Kunming 650223, China.
Zhu Y; Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Yang J; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Yang F; State Key Laboratory of Transducer Technology, Shanghai 200050, China.