Impact of Deposition Power and Gas Flow Ratio on the Tribological Properties of Titanium Vanadium Nitride Thin Films.

Chauhan, Kamlesh V; Rawal, Sushant; Patel, Nicky P; Subhedar, Dattatraya G.

Chauhan KV; CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa 388421, Gujarat, India.
Rawal S; McMaster Manufacturing Research Institute (MMRI), Department of Mechanical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S4L7, Canada.
Patel NP; CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa 388421, Gujarat, India.
Subhedar DG; CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa 388421, Gujarat, India.

Micromachines (Basel) ; 14(9)2023 Sep 19.

Article en En | MEDLINE | ID: mdl-37763951