Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy.
Rev Sci Instrum
; 78(6): 061301, 2007 Jun.
Article
em En
| MEDLINE
| ID: mdl-17614598
ABSTRACT
Analysis of the Raman Stokes peak position and its shift has been frequently used to estimate either temperature or stress in microelectronics and microelectromechanical system devices. However, if both fields are evolving simultaneously, the Stokes shift represents a convolution of these effects, making it difficult to measure either quantity accurately. By using the relative independence of the Stokes linewidth to applied stress, it is possible to deconvolve the signal into an estimation of both temperature and stress. Using this property, a method is presented whereby the temperature and stress were simultaneously measured in doped polysilicon microheaters. A data collection and analysis method was developed to reduce the uncertainty in the measured stresses resulting in an accuracy of +/-40 MPa for an average applied stress of -325 MPa and temperature of 520 degrees C. Measurement results were compared to three-dimensional finite-element analysis of the microheaters and were shown to be in excellent agreement. This analysis shows that Raman spectroscopy has the potential to measure both evolving temperature and stress fields in devices using a single optical measurement.
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Base de dados:
MEDLINE
Assunto principal:
Análise Espectral Raman
/
Algoritmos
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Interpretação de Imagem Assistida por Computador
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Termografia
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Análise de Falha de Equipamento
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Manometria
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Modelos Teóricos
Idioma:
En
Ano de publicação:
2007
Tipo de documento:
Article