Possibilities for projection x-ray lithography using holographic optical elements.
Appl Opt
; 30(13): 1580-2, 1991 May 01.
Article
em En
| MEDLINE
| ID: mdl-20700321
The use of a single flat grazing incidence reflector on which a computer-generated hologram has been written is proposed for projection x-ray lithography.
Texto completo:
1
Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
1991
Tipo de documento:
Article