Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source.
Opt Express
; 19(23): 22470-9, 2011 Nov 07.
Article
em En
| MEDLINE
| ID: mdl-22109124
ABSTRACT
New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40 nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13 nm high harmonic beams, we demonstrate a record 22 nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.
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MEDLINE
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En
Ano de publicação:
2011
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Article