Fabrication of quasiperiodic nanostructures with EUV interference lithography.
Nanotechnology
; 23(10): 105303, 2012 Mar 16.
Article
em En
| MEDLINE
| ID: mdl-22361956
ABSTRACT
We demonstrate the fabrication and analysis of well-ordered high-resolution quasiperiodic nanostructures with feature sizes down to a few tens of nanometers using extreme ultraviolet interference lithography. A well-controlled mask manufacturing process for producing high quality transmission diffraction masks enables simple and fast fabrication of highly ordered 2D quasiperiodic structures using 5- and 8-beam interference setups.
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Base de dados:
MEDLINE
Tipo de estudo:
Clinical_trials
Idioma:
En
Ano de publicação:
2012
Tipo de documento:
Article