Shunting arc plasma source for pure carbon ion beam.
Rev Sci Instrum
; 83(2): 02A510, 2012 Feb.
Article
em En
| MEDLINE
| ID: mdl-22380206
ABSTRACT
A plasma source is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA∕mm(2) at the peak of the pulse.
Texto completo:
1
Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
2012
Tipo de documento:
Article