Short-range six-axis interferometer controlled positioning for scanning probe microscopy.

Lazar, Josef; Klapetek, Petr; Valtr, Miroslav; Hrabina, Jan; Buchta, Zdenek; Cip, Onrej; Cizek, Martin; Oulehla, Jindrich; Sery, Mojmir.

Afiliação

Lazar J; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. joe@isibrno.cz.
Klapetek P; Czech Metrology Institute, Brno, Okruzní 31, Brno 638 00, Czech Republic. pklapetek@cmi.cz.
Valtr M; Czech Metrology Institute, Brno, Okruzní 31, Brno 638 00, Czech Republic. mvaltr@cmi.cz.
Hrabina J; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. shane@isibrno.cz.
Buchta Z; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. buchta@isibrno.cz.
Cip O; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. ocip@isibrno.cz.
Cizek M; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. cizek@isibrno.cz.
Oulehla J; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. oulehla@isibrno.cz.
Sery M; Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. sery@isibrno.cz.

Sensors (Basel) ; 14(1): 877-86, 2014 Jan 07.

Article em En | MEDLINE | ID: mdl-24451463

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2014 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2014 Tipo de documento: Article