Integrated optical dual-cantilever arrays in silica on silicon.
Opt Express
; 22(26): 31801-13, 2014 Dec 29.
Article
em En
| MEDLINE
| ID: mdl-25607148
ABSTRACT
A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.
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Base de dados:
MEDLINE
Assunto principal:
Silício
/
Transdutores de Pressão
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Dióxido de Silício
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Ressonância de Plasmônio de Superfície
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Sistemas Microeletromecânicos
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Dispositivos Ópticos
Idioma:
En
Ano de publicação:
2014
Tipo de documento:
Article