Effects of a dielectric material in an ion source on the ion beam current density and ion beam energy.

Fujiwara, Y; Sakakita, H; Nakamiya, A; Hirano, Y; Kiyama, S.

Afiliação

Fujiwara Y; Department of Engineering Mechanics and Energy, University of Tsukuba, Ibaraki 305-8577, Japan.
Sakakita H; Department of Engineering Mechanics and Energy, University of Tsukuba, Ibaraki 305-8577, Japan.
Nakamiya A; Department of Engineering Mechanics and Energy, University of Tsukuba, Ibaraki 305-8577, Japan.
Hirano Y; Innovative Plasma Processing Group, National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8568, Japan.
Kiyama S; Innovative Plasma Processing Group, National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8568, Japan.

Rev Sci Instrum ; 87(2): 02B930, 2016 Feb.

Article em En | MEDLINE | ID: mdl-26932102

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article