Shearing interference microscope for step-height measurements.

Trinh, HÆ°ng-Xuân; Lin, Shyh-Tsong; Chen, Liang-Chia; Yeh, Sheng-Lih; Chen, Chin-Sheng; Hoang, Hong-Hai.

Afiliação

Trinh HX; Department of Electro-optical Engineering, National Taipei University of Technology, Taipei City, Taiwan.
Lin ST; Department of Electro-optical Engineering, National Taipei University of Technology, Taipei City, Taiwan.
Chen LC; Department of Mechanical Engineering, National Taiwan University, Taipei City, Taiwan.
Yeh SL; Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan City, Taiwan.
Chen CS; Graduate Institute of Automation Technology, National Taipei University of Technology, Taipei City, Taiwan.
Hoang HH; School of Mechanical Engineering, Hanoi University of Science and Technology, 01 Dai Co Viet Street, Hanoi City, Viet Nam.

J Microsc ; 266(2): 178-185, 2017 05.

Article em En | MEDLINE | ID: mdl-28267883