Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry.

Villarrubia, J S; Tondare, V N; Vladár, A E

Villarrubia, J S; Tondare, V N; Vladár, A E.

Afiliação

Villarrubia JS; Engineering Physics Division, Physical Measurements Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, USA 20899.
Tondare VN; Engineering Physics Division, Physical Measurements Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, USA 20899.
Vladár AE; Engineering Physics Division, Physical Measurements Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, USA 20899.

Proc SPIE Int Soc Opt Eng ; 97782016.

Article em En | MEDLINE | ID: mdl-28736475

Palavras-chave

critical dimension (CD); dimensional metrology; model-based metrology; scanning electron microscopy (SEM); simulation; stereo photogrammetry; surface roughness; virtual sample

Texto completo

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article

Texto completo

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article