Evaluation of preparation methods for suspended nano-objects on substrates for dimensional measurements by atomic force microscopy.

Fiala, Petra; Göhler, Daniel; Wessely, Benno; Stintz, Michael; Lazzerini, Giovanni Mattia; Yacoot, Andrew.

Afiliação

Fiala P; Research Group Mechanical Process Engineering, Institute of Process Engineering and Environmental Technology, Technische Universität Dresden, Münchner Platz 3, D-01062 Dresden, Germany.
Göhler D; Research Group Mechanical Process Engineering, Institute of Process Engineering and Environmental Technology, Technische Universität Dresden, Münchner Platz 3, D-01062 Dresden, Germany.
Wessely B; Research Group Mechanical Process Engineering, Institute of Process Engineering and Environmental Technology, Technische Universität Dresden, Münchner Platz 3, D-01062 Dresden, Germany.
Stintz M; Research Group Mechanical Process Engineering, Institute of Process Engineering and Environmental Technology, Technische Universität Dresden, Münchner Platz 3, D-01062 Dresden, Germany.
Lazzerini GM; National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK.
Yacoot A; National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK.

Beilstein J Nanotechnol ; 8: 1774-1785, 2017.

Article em En | MEDLINE | ID: mdl-28904839