Branched Hydrosilane Oligomers as Ideal Precursors for Liquid-Based Silicon-Film Deposition.
Angew Chem Int Ed Engl
; 56(45): 14071-14074, 2017 11 06.
Article
em En
| MEDLINE
| ID: mdl-28977723
ABSTRACT
Herein a convenient synthetic method to obtain 2,2,3,3-tetrasilyltetrasilane 3 and 2,2,3,3,4,4-hexasilylpentasilane 4 on a multigram scale is presented. Proton-coupled 29 Siâ
NMR spectroscopy and single-crystal X-ray crystallography enabled unequivocal structural assignment. Owing to their unique properties, which are reflected in their nonpyrophoric character on contact with air and their enhanced light absorption above 250â
nm, 3 and 4 are valuable precursors for liquid-phase deposition (LPD) and the processing of thin silicon films. Amorphous silicon (a-SiH) films of excellent quality were deposited starting from 3 and characterized by conductivity measurements, ellipsometry, optical microscopy, and Raman spectroscopy.
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MEDLINE
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2017
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Article