Fine electron biprism on a Si-on-insulator chip for off-axis electron holography.
Ultramicroscopy
; 185: 81-89, 2018 02.
Article
em En
| MEDLINE
| ID: mdl-29223803
ABSTRACT
Off-axis electron holography allows both the amplitude and the phase shift of an electron wavefield propagating through a specimen in a transmission electron microscope to be recovered. The technique requires the use of an electron biprism to deflect an object wave and a reference wave to form an interference pattern. Here, we introduce an approach based on semiconductor processing technology to fabricate fine electron biprisms with rectangular cross-sections. By performing electrostatic calculations and preliminary experiments, we demonstrate that such biprisms promise improved performance for electron holography experiments.
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MEDLINE
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En
Ano de publicação:
2018
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Article