Your browser doesn't support javascript.
loading
Atomic layer deposition and properties of ZrO2/Fe2O3 thin films.
Kalam, Kristjan; Seemen, Helina; Ritslaid, Peeter; Rähn, Mihkel; Tamm, Aile; Kukli, Kaupo; Kasikov, Aarne; Link, Joosep; Stern, Raivo; Dueñas, Salvador; Castán, Helena; García, Héctor.
Afiliação
  • Kalam K; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Seemen H; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Ritslaid P; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Rähn M; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Tamm A; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Kukli K; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Kasikov A; Department of Chemistry, University of Helsinki, P. O. Box 55, FI-00014 Helsinki, Finland.
  • Link J; Institute of Physics, University of Tartu, W. Ostwald 1, 50411 Tartu, Estonia.
  • Stern R; National Institute of Chemical Physics and Biophysics, Akadeemia tee 23, 12618 Tallinn, Estonia.
  • Dueñas S; National Institute of Chemical Physics and Biophysics, Akadeemia tee 23, 12618 Tallinn, Estonia.
  • Castán H; Department of Electronics, University of Valladolid, Paseo Belén 15, 47011 Valladolid, Spain.
  • García H; Department of Electronics, University of Valladolid, Paseo Belén 15, 47011 Valladolid, Spain.
Beilstein J Nanotechnol ; 9: 119-128, 2018.
Article em En | MEDLINE | ID: mdl-29441257
ABSTRACT
Thin solid films consisting of ZrO2 and Fe2O3 were grown by atomic layer deposition (ALD) at 400 °C. Metastable phases of ZrO2 were stabilized by Fe2O3 doping. The number of alternating ZrO2 and Fe2O3 deposition cycles were varied in order to achieve films with different cation ratios. The influence of annealing on the composition and structure of the thin films was investigated. Additionally, the influence of composition and structure on electrical and magnetic properties was studied. Several samples exhibited a measurable saturation magnetization and most of the samples exhibited a charge polarization. Both phenomena were observed in the sample with a Zr/Fe atomic ratio of 2.0.
Palavras-chave
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2018 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2018 Tipo de documento: Article