Optimization of the size and shape of the scanning aperture in autocollimator-based deflectometric profilometers.

Lacey, Ian; Geckler, Ralf D; Just, Andreas; Siewert, Frank; Arnold, Thomas; Paetzelt, Hendrik; Smith, Brian V; Yashchuk, Valeriy V.

Afiliação

Lacey I; Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
Geckler RD; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany.
Just A; Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany.
Siewert F; Helmholtz Zentrum Berlin für Materialien und Energie, Department of Optics and Beamlines, Albert-Einstein-Str. 15, 12489 Berlin, Germany.
Arnold T; Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany.
Paetzelt H; Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany.
Smith BV; Engineering Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
Yashchuk VV; Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.

Rev Sci Instrum ; 90(2): 021717, 2019 Feb.

Article em En | MEDLINE | ID: mdl-30831748

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article