PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications.

Ahmad, Mansoor; Bozkurt, Ayhan; Farhanieh, Omid

Ahmad, Mansoor; Bozkurt, Ayhan; Farhanieh, Omid.

Afiliação

Ahmad M; Faculty of Engineering and Natural Sciences, Sabanci University, 34956 Istanbul, Turkey. amansoor@sabanciuniv.edu.
Bozkurt A; Faculty of Engineering and Natural Sciences, Sabanci University, 34956 Istanbul, Turkey. abozkurt@sabanciuniv.edu.
Farhanieh O; Sabanci University Nanotechnology Research and Application Center (SUNUM), 34956 Istanbul, Turkey. abozkurt@sabanciuniv.edu.

Micromachines (Basel) ; 10(5)2019 May 11.

Article em En | MEDLINE | ID: mdl-31083578

Palavras-chave

Capacitive Micromachined Ultrasonic Transducers (CMUTs); Microelectromechanical Systems (MEMS); PMMA; underwater acoustics; wafer bonding

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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Clinical_trials Idioma: En Ano de publicação: 2019 Tipo de documento: Article

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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Clinical_trials Idioma: En Ano de publicação: 2019 Tipo de documento: Article