Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM).

Zhu, Jinlong; Liu, Yanan; Yu, Xin; Zhou, Renjie; Jin, Jian-Ming; Goddard, Lynford L.

Afiliação

Zhu J; Photonic Systems Laboratory, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States.
Liu Y; Center for Computational Electromagnetics, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801-2991 , United States.
Yu X; Photonic Systems Laboratory, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States.
Zhou R; Photonic Systems Laboratory, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States.
Jin JM; Department of Biomedical Engineering , The Chinese University of Hong Kong , Shatin, New Territories , Hong Kong , China.
Goddard LL; Center for Computational Electromagnetics, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801-2991 , United States.

Nano Lett ; 19(8): 5347-5355, 2019 Aug 14.

Article em En | MEDLINE | ID: mdl-31283882