Experimental and Theoretical Study of Multifrequency Surface Acoustic Wave Devices in a Single Si/SiO<sub>2</sub>/ZnO Piezoelectric Structure.

Experimental and Theoretical Study of Multifrequency Surface Acoustic Wave Devices in a Single Si/SiO₂/ZnO Piezoelectric Structure.

Caliendo, Cinzia; Laidoudi, Farouk.

Afiliação

Caliendo C; Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy.
Laidoudi F; Research Center in Industrial Technologies CRTI, P.O. Box 64 Cheraga, Algiers 16014, Algeria.

Sensors (Basel) ; 20(5)2020 Mar 03.

Article em En | MEDLINE | ID: mdl-32138294

Palavras-chave

Rayleigh wave; Sezawa wave; ZnO; multifrequency device; single device structure

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article