A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing.

Wang, Tao; Tang, Zhengjie; Lin, Huamao; Zhan, Kun; Wan, Jiang; Wu, Shihao; Gu, Yuandong; Luo, Wenbo; Zhang, Wanli.

Afiliação

Wang T; University of Electronic Science and Technology of China, School of Electronic Science and Engineering, Xiyuan Avenue, Chengdu 611731, China.
Tang Z; University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Film and Integrated Devices, Xiyuan Avenue, Chengdu 611731, China.
Lin H; Shanghai Industrial µTechnology Research Institute, No. 235, Chengbei Road, Jiading District, Shanghai 201800, China.
Zhan K; University of Electronic Science and Technology of China, School of Electronic Science and Engineering, Xiyuan Avenue, Chengdu 611731, China.
Wan J; University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Film and Integrated Devices, Xiyuan Avenue, Chengdu 611731, China.
Wu S; Shanghai Industrial µTechnology Research Institute, No. 235, Chengbei Road, Jiading District, Shanghai 201800, China.
Gu Y; Shanghai Industrial µTechnology Research Institute, No. 235, Chengbei Road, Jiading District, Shanghai 201800, China.
Luo W; University of Electronic Science and Technology of China, School of Electronic Science and Engineering, Xiyuan Avenue, Chengdu 611731, China.
Zhang W; University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Film and Integrated Devices, Xiyuan Avenue, Chengdu 611731, China.