Analysis of the synchronous phase-shifting method in a white-light spectral interferometer.

ABSTRACT

For white-light spectral interferometry, the phase information is usually retrieved via the Fourier transform method and the temporal phase-shifting method. In comparison, the synchronous phase-shifting method can be used to synchronously acquire interferometric signals with good accuracy and reduced noise. Therefore, it has potential for online measurement and is suitable for application in precision industries and for ultrahigh-speed measurement. In this work, a white-light spectral interferometer for synchronous phase shifting based on polarization interference was built, and the two-step phase-shifting algorithm was used to retrieve phase information. A variety of spectral interferometric signals were simulated based on the mathematical model of the two-step phase-shifting algorithm to illustrate the effects of differences in intensity and envelope shape, random noise, and phase-shift error on measurement of the absolute distance. Measurements of the absolute distance were conducted, and they indicated that the system had high accuracy.