High-<i>Q</i> Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO<sub>2</sub>.

High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO₂.

Butcher, Amy; Guo, Xinghan; Shreiner, Robert; Delegan, Nazar; Hao, Kai; Duda, Peter J; Awschalom, David D; Heremans, F Joseph; High, Alexander A.

Afiliação

Butcher A; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.
Guo X; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.
Shreiner R; Department of Physics, University of Chicago, Chicago, Illinois 60637, United States.
Delegan N; Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, United States.
Hao K; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.
Duda PJ; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.
Awschalom DD; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.
Heremans FJ; Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, United States.
High AA; Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States.