A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films.

Kim, Si Joon; Mohan, Jaidah; Kim, Harrison Sejoon; Hwang, Su Min; Kim, Namhun; Jung, Yong Chan; Sahota, Akshay; Kim, Kihyun; Yu, Hyun-Yong; Cha, Pil-Ryung; Young, Chadwin D; Choi, Rino; Ahn, Jinho; Kim, Jiyoung

A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf_0.5Zr_0.5O₂ Thin Films.

Kim, Si Joon; Mohan, Jaidah; Kim, Harrison Sejoon; Hwang, Su Min; Kim, Namhun; Jung, Yong Chan; Sahota, Akshay; Kim, Kihyun; Yu, Hyun-Yong; Cha, Pil-Ryung; Young, Chadwin D; Choi, Rino; Ahn, Jinho; Kim, Jiyoung.

Afiliação

Kim SJ; Department of Electrical and Electronics Engineering, Kangwon National University, 1 Gangwondaehakgil, Chuncheon, Gangwon-do 24341, Korea.
Mohan J; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Kim HS; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Hwang SM; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Kim N; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Jung YC; Department of Materials Science and Engineering, Inha University, 100 Inha-ro, Michuhol-gu, Incheon 22212, Korea.
Sahota A; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Kim K; Department of Electrical and Computer Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Yu HY; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Cha PR; Department of Materials Science and Engineering, Inha University, 100 Inha-ro, Michuhol-gu, Incheon 22212, Korea.
Young CD; School of Electrical Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Korea.
Choi R; School of Advanced Materials Engineering, Kookmin University, 77 Jeongneung-ro, Seongbuk-gu, Seoul 02707, Korea.
Ahn J; Department of Materials Science and Engineering, The University of Texas at Dallas, 800 West Campbell Road, Richardson, TX 75080, USA.
Kim J; Department of Materials Science and Engineering, Inha University, 100 Inha-ro, Michuhol-gu, Incheon 22212, Korea.