On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing.

Piras, Daniele; van Neer, Paul L M J; Thijssen, Rutger M T; Sadeghian, Hamed.

Afiliação

Piras D; Netherlands Organization for Applied Scientific Research, TNO, 2628 CK Delft, The Netherlands.
van Neer PLMJ; Netherlands Organization for Applied Scientific Research, TNO, 2628 CK Delft, The Netherlands.
Thijssen RMT; Netherlands Organization for Applied Scientific Research, TNO, 2628 CK Delft, The Netherlands.
Sadeghian H; Department of Mechanical Engineering, TU Eindhoven, 5600 MB Eindhoven, The Netherlands.

Rev Sci Instrum ; 91(8): 083702, 2020 Aug 01.

Article em En | MEDLINE | ID: mdl-32872977

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article