First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope.

Wang, Hao; Wang, Xiupu; Xie, Jianbing.

Afiliação

Wang H; MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.
Wang X; MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.
Xie J; MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.

Sensors (Basel) ; 20(22)2020 Nov 12.

Article em En | MEDLINE | ID: mdl-33198155