Thermal Imaging of Block Copolymers with Sub-10 nm Resolution.

Gottlieb, Steven; Pigard, Louis; Ryu, Yu Kyoung; Lorenzoni, Matteo; Evangelio, Laura; Fernández-Regúlez, Marta; Rawlings, Colin D; Spieser, Martin; Perez-Murano, Francesc; Müller, Marcus; Knoll, Armin W.

Afiliação

Gottlieb S; Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.
Pigard L; Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany.
Ryu YK; IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland.
Lorenzoni M; Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.
Evangelio L; Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.
Fernández-Regúlez M; Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.
Rawlings CD; IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland.
Spieser M; SwissLitho AG, Technoparkstrasse 1, 8805 Zürich, Switzerland.
Perez-Murano F; Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain.
Müller M; Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany.
Knoll AW; IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland.