Resolution of non-destructive imaging by controlled acceleration voltage in scanning electron microscopy.

Elphick, Kelvin; Aditya, Bernardus D; Wu, Jiaqi; Ohta, Michihiro; Hirohata, Atsufumi.

Afiliação

Elphick K; Department of Electronic Engineering, University of York, York YO10 5DD, United Kingdom; Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong.
Aditya BD; Department of Material Science and Engineering, City University of Hong Kong, Kowloon, Hong Kong; Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong.
Wu J; Department of Material Science and Engineering, City University of Hong Kong, Kowloon, Hong Kong; Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong.
Ohta M; Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong; Department of Electrical Engineering, Nagaoka University of Technology, Nagaoka 940-2118, Japan.
Hirohata A; Department of Electronic Engineering, University of York, York YO10 5DD, United Kingdom; Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong. Electronic address: atsufumi.hirohata@york.ac.uk.

Ultramicroscopy ; 228: 113316, 2021 Sep.

Article em En | MEDLINE | ID: mdl-34119806

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article