Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications.

Fan, Xuge; Smith, Anderson D; Forsberg, Fredrik; Wagner, Stefan; Schröder, Stephan; Akbari, Sayedeh Shirin Afyouni; Fischer, Andreas C; Villanueva, Luis Guillermo; Östling, Mikael; Lemme, Max C; Niklaus, Frank

Fan, Xuge; Smith, Anderson D; Forsberg, Fredrik; Wagner, Stefan; Schröder, Stephan; Akbari, Sayedeh Shirin Afyouni; Fischer, Andreas C; Villanueva, Luis Guillermo; Östling, Mikael; Lemme, Max C; Niklaus, Frank.

Afiliação

Fan X; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
Smith AD; Division of Integrated Devices and Circuits, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-164 40 Kista, Sweden.
Forsberg F; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
Wagner S; Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
Schröder S; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
Akbari SSA; Advanced NEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Fischer AC; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
Villanueva LG; Silex Microsystems AB, 175 26 Järfälla, Sweden.
Östling M; Advanced NEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Lemme MC; Division of Integrated Devices and Circuits, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-164 40 Kista, Sweden.
Niklaus F; Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.