Parallel emitted silicon nitride nanophotonic phased arrays for two-dimensional beam steering.

In this Letter, a two-dimensional (2D) beam steering on silicon nitride (SiNx) nanophotonic phased arrays from visible to near-infrared wavelengths is reported for the first time, to the best of our knowledge. In order to implement beam steering along the transverse direction for one-dimensional waveguide surface grating arrays, wavelengths from 650 to 980 nm provided by the supercontinuum laser are used to excite the phased array. Then the beams are parallel radiated with steering angles in a sequence of 26.84° to -16.54∘ along the transverse direction, and a continuous line in the far field consisting of parallel emitted spots is produced with a total view angle of 43.38°. Moreover, this continuous far-field line is steered along the longitudinal direction with massive wavelengths simultaneously tuned by phase shifts from -π/2 to over +π/2. This method with massive parallel wavelengths emitted paves a new way for 2D steering on SiNx nanophotonic phased arrays.