Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications.

Gikunda, Millicent N; Harerimana, Ferdinand; Mangum, James M; Rahman, Sumaya; Thompson, Joshua P; Harris, Charles Thomas; Churchill, Hugh O H; Thibado, Paul M.

Afiliação

Gikunda MN; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Harerimana F; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Mangum JM; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Rahman S; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Thompson JP; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Harris CT; Sandia National Laboratories, Albuquerque, NM 87123, USA.
Churchill HOH; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Thibado PM; Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA.

Membranes (Basel) ; 12(5)2022 May 19.

Article em En | MEDLINE | ID: mdl-35629859